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Ramprakash SANKARAKRISHNAN

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  • Santa Clara, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    PECVD process
    • Patent number 11,898,249
    • Issue date Feb 13, 2024
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 11,613,812
    • Issue date Mar 28, 2023
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-zone pedestal for plasma processing
    • Patent number 10,971,389
    • Issue date Apr 6, 2021
    • Applied Materials, Inc.
    • Xing Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Bottom and side plasma tuning having closed loop control
    • Patent number 10,910,227
    • Issue date Feb 2, 2021
    • Applied Materials, Inc.
    • Juan Carlos Rocha-Alvarez
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dual-zone heater for plasma processing
    • Patent number 10,811,301
    • Issue date Oct 20, 2020
    • Applied Materials, Inc.
    • Xing Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 10,793,954
    • Issue date Oct 6, 2020
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Controlling temperature in substrate processing systems
    • Patent number 10,544,508
    • Issue date Jan 28, 2020
    • Applied Materials, Inc.
    • Juan Carlos Rocha-Alvarez
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing chamber with irradiance curing lens
    • Patent number 10,541,159
    • Issue date Jan 21, 2020
    • Applied Materials, Inc.
    • Orlando Trejo
    • G02 - OPTICS
  • Information Patent Grant

    Methods of dry stripping boron-carbon films
    • Patent number 10,510,518
    • Issue date Dec 17, 2019
    • Applied Materials, Inc.
    • Kwangduk Douglas Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Dual-zone heater for plasma processing
    • Patent number 10,497,606
    • Issue date Dec 3, 2019
    • Applied Materials, Inc.
    • Xing Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    High impedance RF filter for heater with impedance tuning device
    • Patent number 10,450,653
    • Issue date Oct 22, 2019
    • Applied Materials, Inc.
    • Jian J. Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus and method for purging gaseous compounds
    • Patent number 10,385,448
    • Issue date Aug 20, 2019
    • Applied Materials, Inc.
    • Juan Carlos Rocha-Alvarez
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Isolator for a substrate processing chamber
    • Patent number 10,370,764
    • Issue date Aug 6, 2019
    • Applied Materials, Inc.
    • Ramprakash Sankarakrishnan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetron having enhanced cooling characteristics
    • Patent number 10,290,459
    • Issue date May 14, 2019
    • Applied Materials, Inc.
    • Govinda Raj
    • B22 - CASTING POWDER METALLURGY
  • Information Patent Grant

    Apparatus and method for purging gaseous compounds
    • Patent number 10,161,035
    • Issue date Dec 25, 2018
    • Applied Materials, Inc.
    • Juan Carlos Rocha-Alvarez
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetron having enhanced cooling characteristics
    • Patent number 10,141,153
    • Issue date Nov 27, 2018
    • Applied Materials, Inc.
    • Govinda Raj
    • B22 - CASTING POWDER METALLURGY
  • Information Patent Grant

    High impedance RF filter for heater with impedance tuning device
    • Patent number 10,125,422
    • Issue date Nov 13, 2018
    • Applied Materials, Inc.
    • Jian J. Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Bottom and side plasma tuning having closed loop control
    • Patent number 10,128,118
    • Issue date Nov 13, 2018
    • Applied Materials, Inc.
    • Juan Carlos Rocha-Alvarez
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and system for supplying a cleaning gas into a process chamber
    • Patent number 10,094,486
    • Issue date Oct 9, 2018
    • Applied Materials, Inc.
    • Ramprakash Sankarakrishnan
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Multi-zone pedestal for plasma processing
    • Patent number 10,090,187
    • Issue date Oct 2, 2018
    • Applied Materials, Inc.
    • Xing Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 10,060,032
    • Issue date Aug 28, 2018
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD apparatus and process
    • Patent number 10,030,306
    • Issue date Jul 24, 2018
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer rotation in a semiconductor chamber
    • Patent number 9,922,819
    • Issue date Mar 20, 2018
    • Applied Materials, Inc.
    • Ganesh Balasubramanian
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 9,816,187
    • Issue date Nov 14, 2017
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-zone pedestal for plasma processing
    • Patent number 9,725,806
    • Issue date Aug 8, 2017
    • Applied Materials, Inc.
    • Xing Lin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer rotation in a semiconductor chamber
    • Patent number 9,593,419
    • Issue date Mar 14, 2017
    • Applied Materials, Inc.
    • Ganesh Balasubramanian
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 9,458,537
    • Issue date Oct 4, 2016
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Critical chamber component surface improvement to reduce chamber pa...
    • Patent number 9,428,424
    • Issue date Aug 30, 2016
    • Applied Materials, Inc.
    • Ren-Guan Duan
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Grant

    Methods of dry stripping boron-carbon films
    • Patent number 9,299,581
    • Issue date Mar 29, 2016
    • Applied Materials, Inc.
    • Kwangduk Douglas Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and system for supplying a cleaning gas into a process chamber
    • Patent number 9,206,511
    • Issue date Dec 8, 2015
    • Applied Materials, Inc.
    • Ramprakash Sankarakrishnan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PECVD PROCESS
    • Publication number 20230193466
    • Publication date Jun 22, 2023
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20200399756
    • Publication date Dec 24, 2020
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DUAL-ZONE HEATER FOR PLASMA PROCESSING
    • Publication number 20200051848
    • Publication date Feb 13, 2020
    • Applied Materials, Inc.
    • Xing LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
    • Publication number 20200010957
    • Publication date Jan 9, 2020
    • Applied Materials, Inc.
    • Jian J. CHEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ISOLATOR FOR A SUBSTRATE PROCESSING CHAMBER
    • Publication number 20190360102
    • Publication date Nov 28, 2019
    • Applied Materials, Inc.
    • Ramprakash SANKARAKRISHNAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
    • Publication number 20190177848
    • Publication date Jun 13, 2019
    • Applied Materials, Inc.
    • Jian J. CHEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BOTTOM AND SIDE PLASMA TUNING HAVING CLOSED LOOP CONTROL
    • Publication number 20190080916
    • Publication date Mar 14, 2019
    • Applied Materials, Inc.
    • Juan Carlos ROCHA-ALVAREZ
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MAGNETRON HAVING ENHANCED COOLING CHARACTERISTICS
    • Publication number 20190051485
    • Publication date Feb 14, 2019
    • Applied Materials, Inc.
    • Govinda RAJ
    • B22 - CASTING POWDER METALLURGY
  • Information Patent Application

    MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
    • Publication number 20190035665
    • Publication date Jan 31, 2019
    • Applied Materials, Inc.
    • XING LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20180258535
    • Publication date Sep 13, 2018
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20180066364
    • Publication date Mar 8, 2018
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING CHAMBER WITH IRRADIANCE CURING LENS
    • Publication number 20170345649
    • Publication date Nov 30, 2017
    • Applied Materials, Inc.
    • Orlando TREJO
    • G02 - OPTICS
  • Information Patent Application

    MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
    • Publication number 20170263484
    • Publication date Sep 14, 2017
    • Applied Materials, Inc.
    • XING LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
    • Publication number 20170162385
    • Publication date Jun 8, 2017
    • Applied Materials, Inc.
    • Ganesh BALASUBRAMANIAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    3D PRINTED MAGNETRON HAVING ENHANCED COOLING CHARACTERISTICS
    • Publication number 20170084418
    • Publication date Mar 23, 2017
    • Applied Materials, Inc.
    • Govinda RAJ
    • B33 - ADDITIVE MANUFACTURING TECHNOLOGY
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20170016118
    • Publication date Jan 19, 2017
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DUAL-ZONE HEATER FOR PLASMA PROCESSING
    • Publication number 20160230281
    • Publication date Aug 11, 2016
    • Applied Materials, Inc.
    • Xing LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR PURGING GASEOUS COMPOUNDS
    • Publication number 20160222507
    • Publication date Aug 4, 2016
    • Applied Materials, Inc.
    • Juan Carlos ROCHA-ALVAREZ
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DRY STRIPPING BORON-CARBON FILMS
    • Publication number 20160133443
    • Publication date May 12, 2016
    • Applied Materials, Inc.
    • Kwangduk Douglas LEE
    • B08 - CLEANING
  • Information Patent Application

    METHOD AND SYSTEM FOR SUPPLYING A CLEANING GAS INTO A PROCESS CHAMBER
    • Publication number 20160084400
    • Publication date Mar 24, 2016
    • Applied Materials, Inc.
    • Ramprakash SANKARAKRISHNAN
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    METHODS OF DRY STRIPPING BORON-CARBON FILMS
    • Publication number 20160064209
    • Publication date Mar 3, 2016
    • Applied Materials, Inc.
    • Kwangduk Douglas LEE
    • B08 - CLEANING
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20160017497
    • Publication date Jan 21, 2016
    • Applied Materials, Inc.
    • NAGARAJAN RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
    • Publication number 20160002779
    • Publication date Jan 7, 2016
    • Applied Materials, Inc.
    • XING LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
    • Publication number 20150262859
    • Publication date Sep 17, 2015
    • Applied Materials, Inc.
    • Ganesh BALASUBRAMANIAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CRITICAL CHAMBER COMPONENT SURFACE IMPROVEMENT TO REDUCE CHAMBER PA...
    • Publication number 20150251961
    • Publication date Sep 10, 2015
    • Applied Materials, Inc.
    • Ren-Guan DUAN
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    PECVD APPARATUS AND PROCESS
    • Publication number 20150226540
    • Publication date Aug 13, 2015
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ISOLATOR FOR A SUBSTRATE PROCESSING CHAMBER
    • Publication number 20150122775
    • Publication date May 7, 2015
    • Applied Materials, Inc.
    • Ramprakash SANKARAKRISHNAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
    • Publication number 20140302256
    • Publication date Oct 9, 2014
    • Applied Materials, Inc.
    • Jian J. CHEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH THROUGHPUT MULTI-LAYER STACK DEPOSITION
    • Publication number 20140287593
    • Publication date Sep 25, 2014
    • Xinhai HAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF DRY STRIPPING BORON-CARBON FILMS
    • Publication number 20140216498
    • Publication date Aug 7, 2014
    • Kwangduk Douglas LEE
    • B08 - CLEANING