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Ran LIN
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Atomic layer etching for subtractive metal etch
Patent number
11,935,758
Issue date
Mar 19, 2024
Lam Research Corporation
Wenbing Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES
Publication number
20240304428
Publication date
Sep 12, 2024
LAM RESEARCH CORPORATION
Wenbing YANG
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
Publication number
20240186150
Publication date
Jun 6, 2024
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ETCH
Publication number
20240021435
Publication date
Jan 18, 2024
LAM RESEARCH CORPORATION
Yiwen FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBTRACTIVE COPPER ETCH
Publication number
20230298869
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING A CHAMBER
Publication number
20230230819
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Ran LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL ETCH NONVOLATILE MATERIALS FOR MRAM PATTERNING
Publication number
20220376174
Publication date
Nov 24, 2022
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
Publication number
20220199422
Publication date
Jun 23, 2022
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS