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Ran Liu
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Methods and systems to modulate film stress
Patent number
11,887,818
Issue date
Jan 30, 2024
Applied Materials, Inc.
Tsutomu Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and systems to modulate film stress
Patent number
11,158,489
Issue date
Oct 26, 2021
Applied Materials, Inc.
Tsutomu Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
METHODS AND SYSTEMS TO MODULATE FILM STRESS
Publication number
20220028660
Publication date
Jan 27, 2022
Applied Materials, Inc.
Tsutomu Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods And Systems To Modulate Film Stress
Publication number
20180130642
Publication date
May 10, 2018
Applied Materials, Inc.
Tsutomu Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...