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last 30 patents
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Patent Grant
Process kit geometry for particle reduction in PVD processes
Patent number
11,935,732
Issue date
Mar 19, 2024
Applied Materials, Inc.
Adolph M. Allen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for substrate edge uniformity
Patent number
11,056,325
Issue date
Jul 6, 2021
Applied Materials, Inc.
Thanh X. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
Publication number
20220186361
Publication date
Jun 16, 2022
Kirankumar Neelasandra SAVANDAIAH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS KIT GEOMETRY FOR PARTICLE REDUCTION IN PVD PROCESSES
Publication number
20190237311
Publication date
Aug 1, 2019
Applied Materials, Inc.
ADOLPH M. ALLEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY
Publication number
20190189407
Publication date
Jun 20, 2019
Applied Materials, Inc.
THANH X. NGUYEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...