Randall L. Mundt

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of and apparatuses for measuring electrical parameters of a...
- Patent number 9,029,728
- Issue date May 12, 2015
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Methods of and apparatuses for maintenance, diagnosis, and optimiza...
- Patent number 8,698,037
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Methods of and apparatuses for measuring electrical parameters of a...
- Patent number 7,960,670
- Issue date Jun 14, 2011
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Sensor apparatus power transfer, communication and maintenance meth...
- Patent number 7,531,984
- Issue date May 12, 2009
- KLA-Tencor Corporation
- Mason L. Freed
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatuses for and methods of monitoring optical radiation paramet...
- Patent number 7,482,576
- Issue date Jan 27, 2009
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Maintenance unit for a sensor apparatus
- Patent number 7,282,889
- Issue date Oct 16, 2007
- OnWafer Technologies, Inc.
- Mason L. Freed
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Process tolerant methods and apparatus for obtaining data
- Patent number 7,127,362
- Issue date Oct 24, 2006
- Randall S. Mundt
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for in-situ monitoring of plasma etch and depo...
- Patent number RE39145
- Issue date Jun 27, 2006
- Lam Research Corporation
- Andrew Perry
- 356 - Optics: measuring and testing
Information Patent Grant
Methods and apparatus for deriving thermal flux data for processing...
- Patent number 6,907,364
- Issue date Jun 14, 2005
- OnWafer Technologies, Inc.
- Kameshwar Poolla
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatuses for trench depth detection and control
- Patent number 6,878,301
- Issue date Apr 12, 2005
- Lam Research
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for firefighting
- Patent number 6,719,456
- Issue date Apr 13, 2004
- Randall S. Mundt
- G08 - SIGNALLING
Information Patent Grant
Methods and apparatus for obtaining data for process operation, opt...
- Patent number 6,691,068
- Issue date Feb 10, 2004
- OnWafer Technologies, Inc.
- Mason L. Freed
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for characterization of microelectronic feature quality
- Patent number 6,642,063
- Issue date Nov 4, 2003
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatuses for trench depth detection and control
- Patent number 6,582,619
- Issue date Jun 24, 2003
- Lam Research Corporation
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data collection methods and apparatus
- Patent number 6,542,835
- Issue date Apr 1, 2003
- OnWafer Technologies, Inc.
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for characterization of microelectronic feature quality
- Patent number 6,432,729
- Issue date Aug 13, 2002
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in-situ monitoring of plasma etch and depo...
- Patent number 6,160,621
- Issue date Dec 12, 2000
- Lam Research Corporation
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Grant
Method for monitoring process endpoints in a plasma chamber and a p...
- Patent number 5,846,373
- Issue date Dec 8, 1998
- Lam Research Corporation
- David R. Pirkle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature mapping method
- Patent number 5,718,511
- Issue date Feb 17, 1998
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Topology induced plasma enhancement for etched uniformity improvement
- Patent number 5,714,031
- Issue date Feb 3, 1998
- Lam Research Corporation
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particulate free vacuum compatible pinch seal
- Patent number 5,702,533
- Issue date Dec 30, 1997
- Lam Research Corporation
- Randall S. Mundt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for mapping plasma characteristics
- Patent number 5,654,796
- Issue date Aug 5, 1997
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining the center and orientation of...
- Patent number 5,644,400
- Issue date Jul 1, 1997
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Topology induced plasma enhancement for etched uniformity improvement
- Patent number 5,472,565
- Issue date Dec 5, 1995
- Lam Research Corporation
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid electrostatic chuck
- Patent number 5,463,526
- Issue date Oct 31, 1995
- Lam Research Corporation
- Randall S. Mundt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design to minimize particle generation in chemical...
- Patent number 5,368,646
- Issue date Nov 29, 1994
- Lam Research Corporation
- Arthur K. Yasuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for clamping semiconductor wafers
- Patent number 5,262,029
- Issue date Nov 16, 1993
- Lam Research
- David Erskine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design and method to minimize particle generation...
- Patent number 5,200,232
- Issue date Apr 6, 1993
- Lam Research Corporation
- James E. Tappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF AND APPARATUSES FOR MEASURING ELECTRICAL PARAMETERS OF A...
- Publication number 20140312916
- Publication date Oct 23, 2014
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF AND APPARATUSES FOR MAINTENANCE, DIAGNOSIS, AND OPTIMIZA...
- Publication number 20110240610
- Publication date Oct 6, 2011
- KLA-Tencor Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Application
Apparatuses for and methods of monitoring optical radiation paramet...
- Publication number 20060289763
- Publication date Dec 28, 2006
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Application
Methods of and apparatuses for measuring electrical parameters of a...
- Publication number 20060249729
- Publication date Nov 9, 2006
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Application
Sensor apparatus management methods and apparatus
- Publication number 20060181242
- Publication date Aug 17, 2006
- Mason L. Freed
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Sensor apparatus management methods and apparatus
- Publication number 20040267501
- Publication date Dec 30, 2004
- Mason L. Freed
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Process tolerant methods and apparatus for obtaining data
- Publication number 20040236524
- Publication date Nov 25, 2004
- Randall S. Mundt
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods and apparatus for deriving thermal flux data for processing...
- Publication number 20040107066
- Publication date Jun 3, 2004
- Kameshwar Poolla
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatuses for trench depth detection and control
- Publication number 20030222049
- Publication date Dec 4, 2003
- LAM RESEARCH
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for firefighting
- Publication number 20030076867
- Publication date Apr 24, 2003
- Randall S. Mundt
- G08 - SIGNALLING
Information Patent Application
Apparatus for characterization of microelectronic feature quality
- Publication number 20030020917
- Publication date Jan 30, 2003
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Application
Data collection methods and apparatus
- Publication number 20020165678
- Publication date Nov 7, 2002
- Randall S. Mundt
- H01 - BASIC ELECTRIC ELEMENTS

Randall L. Mundt

Person

Patents Grantslast 30 patents

Methods of and apparatuses for measuring electrical parameters of a...

Methods of and apparatuses for maintenance, diagnosis, and optimiza...

Methods of and apparatuses for measuring electrical parameters of a...

Sensor apparatus power transfer, communication and maintenance meth...

Apparatuses for and methods of monitoring optical radiation paramet...

Maintenance unit for a sensor apparatus

Process tolerant methods and apparatus for obtaining data

Method and apparatus for in-situ monitoring of plasma etch and depo...

Methods and apparatus for deriving thermal flux data for processing...

Methods and apparatuses for trench depth detection and control

Methods and apparatus for firefighting

Methods and apparatus for obtaining data for process operation, opt...

Apparatus for characterization of microelectronic feature quality

Methods and apparatuses for trench depth detection and control

Data collection methods and apparatus

Method for characterization of microelectronic feature quality

Method and apparatus for in-situ monitoring of plasma etch and depo...

Method for monitoring process endpoints in a plasma chamber and a p...

Temperature mapping method

Topology induced plasma enhancement for etched uniformity improvement

Particulate free vacuum compatible pinch seal

Apparatus and method for mapping plasma characteristics

Method and apparatus for determining the center and orientation of...

Topology induced plasma enhancement for etched uniformity improvement

Hybrid electrostatic chuck

Reaction chamber design to minimize particle generation in chemical...

Method and system for clamping semiconductor wafers

Reaction chamber design and method to minimize particle generation...

Patents Applicationslast 30 patents

METHODS OF AND APPARATUSES FOR MEASURING ELECTRICAL PARAMETERS OF A...

METHODS OF AND APPARATUSES FOR MAINTENANCE, DIAGNOSIS, AND OPTIMIZA...

Apparatuses for and methods of monitoring optical radiation paramet...

Methods of and apparatuses for measuring electrical parameters of a...

Sensor apparatus management methods and apparatus

Sensor apparatus management methods and apparatus

Process tolerant methods and apparatus for obtaining data

Methods and apparatus for deriving thermal flux data for processing...

Methods and apparatuses for trench depth detection and control

Methods and apparatus for firefighting

Apparatus for characterization of microelectronic feature quality

Data collection methods and apparatus