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Randall M. Feenstra
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Tarrytown, NY, US
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last 30 patents
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Patent Grant
In-situ endpoint detection method and apparatus for chemical-mechan...
Patent number
5,337,015
Issue date
Aug 9, 1994
International Business Machines Corporation
Naftali E. Lustig
B24 - GRINDING POLISHING
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Patent Grant
Narrow line width pattern fabrication
Patent number
4,550,257
Issue date
Oct 29, 1985
International Business Machines Corporation
Gerd K. Binnig
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...