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Randhir P. Singh Thakur
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San Jose, CA, US
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last 30 patents
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Patent Grant
Silicon nitride film with stress control
Patent number
7,488,690
Issue date
Feb 10, 2009
Applied Materials, Inc.
R. Suryanarayanan Iyer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Silicon nitride film with stress control
Publication number
20060009041
Publication date
Jan 12, 2006
R. Suryanarayanan Iyer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Methods for forming silicon comprising films using hexachlorodisila...
Publication number
20040086640
Publication date
May 6, 2004
APPLIED MATERIALS, INC.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Cycling deposition of low temperature films in a cold wall single w...
Publication number
20030059535
Publication date
Mar 27, 2003
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...