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Randy Hall
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Santra Cruz, CA, US
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last 30 patents
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Patent Grant
In situ plasma process to remove fluorine residues from the interio...
Patent number
6,872,323
Issue date
Mar 29, 2005
Novellus Systems, Inc.
William R. Entley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Mixing of materials in an integrated circuit manufacturing equipment
Patent number
6,758,591
Issue date
Jul 6, 2004
Novellus Systems, Inc.
Peter Krotov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...