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Randy Johnson
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Newark, CA, US
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last 30 patents
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Patent Grant
Apparatus for isolated bevel edge clean and method for using the same
Patent number
8,127,395
Issue date
Mar 6, 2012
Lam Research Corporation
Hyungsuk Alexander Yoon
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
Methods for Isolated Bevel Edge Clean
Publication number
20120118320
Publication date
May 17, 2012
LAM RESEARCH CORPORATION
Hyungsuk Alexander Yoon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Apparatus for isolated bevel edge clean and method for using the same
Publication number
20090113656
Publication date
May 7, 2009
LAM RESEARCH CORPORATION
Hyungsuk Alexander Yoon
H01 - BASIC ELECTRIC ELEMENTS