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Method for planarizing photoresist
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Patent number 6,361,402
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Issue date Mar 26, 2002
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International Business Machines Corporation
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Donald F. Canaperi
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B24 - GRINDING POLISHING
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Selective etching of silicate
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Patent number 6,254,796
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Issue date Jul 3, 2001
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International Business Machines Corporation
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David L. Rath
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C03 - GLASS MINERAL OR SLAG WOOL
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Removal of dielectric oxides
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Patent number 6,200,891
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Issue date Mar 13, 2001
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International Business Machines Corporation
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Rangarajan Jagannathan
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H01 - BASIC ELECTRIC ELEMENTS
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Method for cleaning semiconductor devices
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Patent number 6,191,085
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Issue date Feb 20, 2001
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International Business Machines Corporation
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Emanuel I. Cooper
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C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
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Removal of silicon oxide
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Patent number 6,117,796
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Issue date Sep 12, 2000
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International Business Machines Corporation
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Glenn W. Gale
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H01 - BASIC ELECTRIC ELEMENTS
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Etching of silicon nitride
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Patent number 6,066,267
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Issue date May 23, 2000
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International Business Machines Corporation
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David L. Rath
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H01 - BASIC ELECTRIC ELEMENTS
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Etching of silicon nitride
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Patent number 5,965,465
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Issue date Oct 12, 1999
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International Business Machines Corporation
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David L. Rath
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H01 - BASIC ELECTRIC ELEMENTS
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Method for cleaning semiconductor devices
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Patent number 5,962,384
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Issue date Oct 5, 1999
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International Business Machines Corporation
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Emanuel I. Cooper
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C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
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Method of planarizing semiconductor wafers
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Patent number 5,935,869
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Issue date Aug 10, 1999
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International Business Machines Corporation
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Cuc Huynh
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C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
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Etching composition and use thereof
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Patent number 5,780,363
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Issue date Jul 14, 1998
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International Business Machines Coporation
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Donald John Delehanty
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Electroless copper plating bath
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Patent number 4,818,286
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Issue date Apr 4, 1989
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International Business Machines Corporation
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Rangarajan Jagannathan
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...