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Rangesh Raghavan
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Fremont, CA, US
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last 30 patents
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Patent Grant
Equipment front end module for transferring wafers and method of tr...
Patent number
9,818,633
Issue date
Nov 14, 2017
Lam Research Corporation
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
EQUIPMENT FRONT END MODULE FOR TRANSFERRING WAFERS AND METHOD OF TR...
Publication number
20160111309
Publication date
Apr 21, 2016
LAM RESEARCH CORPORATION
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS