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Raphael Casaes
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Edge ring arrangement with moveable edge rings
Patent number
12,027,410
Issue date
Jul 2, 2024
Lam Research Corporation
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable and/or collapsible edge ring assemblies for plasma shea...
Patent number
11,798,789
Issue date
Oct 24, 2023
Lam Research Corporation
Alejandro Sanchez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Moveable edge coupling ring for edge process control during semicon...
Patent number
10,658,222
Issue date
May 19, 2020
Lam Research Corporation
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlling temperature of a faraday shield
Patent number
9,029,267
Issue date
May 12, 2015
Lam Research Corporation
Sanket Sant
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus of halogen removal
Patent number
8,525,139
Issue date
Sep 3, 2013
Lam Research Corporation
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extending storage time of removed plasma chamber components prior t...
Patent number
8,216,388
Issue date
Jul 10, 2012
Lam Research Corporation
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Extending storage time of removed plasma chamber components prior t...
Patent number
7,976,641
Issue date
Jul 12, 2011
Lam Research Corporation
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for cleaning microwave applicator tube
Patent number
7,638,004
Issue date
Dec 29, 2009
Lam Research Corporation
Hong Shih
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
Publication number
20240355667
Publication date
Oct 24, 2024
LAM RESEARCH CORPORATION
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
Publication number
20240038504
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Alejandro SANCHEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
Publication number
20210183687
Publication date
Jun 17, 2021
LAM RESEARCH CORPORATION
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
Publication number
20200395195
Publication date
Dec 17, 2020
LAM RESEARCH CORPORATION
Alejandro SANCHEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE RING DESIGN
Publication number
20190013232
Publication date
Jan 10, 2019
LAM RESEARCH CORPORATION
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...
Publication number
20160211166
Publication date
Jul 21, 2016
LAM RESEARCH CORPORATION
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROLLING TEMPERATURE OF A FARADAY SHIELD
Publication number
20140342568
Publication date
Nov 20, 2014
LAM RESEARCH CORPORATION
Sanket Sant
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RES...
Publication number
20130102156
Publication date
Apr 25, 2013
LAM RESEARCH CORPORATION
Tom Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTENDING STORAGE TIME OF REMOVED PLASMA CHAMBER COMPONENTS PRIOR T...
Publication number
20110232678
Publication date
Sep 29, 2011
LAM RESEARCH CORPORATION
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS OF HALOGEN REMOVAL
Publication number
20110097902
Publication date
Apr 28, 2011
LAM RESEARCH CORPORATION
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS