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Raphael Nico Johan STEGEN
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Fluid handling structure, a lithographic apparatus, a method of usi...
Patent number
11,809,086
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Raphael Nico Johan Stegen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process tool and an inspection method
Patent number
11,720,032
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Raphael Nico Johan Stegen
G01 - MEASURING TESTING
Information
Patent Grant
Fluid handling structure, lithographic apparatus, and method of usi...
Patent number
11,156,921
Issue date
Oct 26, 2021
ASML Netherlands B.V.
Raphael Nico Johan Stegen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USI...
Publication number
20220035254
Publication date
Feb 3, 2022
ASML NETHERLANDS B.V.
Raphael Nico Johan STEGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A PROCESS TOOL AND AN INSPECTION METHOD
Publication number
20210349397
Publication date
Nov 11, 2021
ASML NETHERLANDS B.V.
Raphael Nico Johan STEGEN
G01 - MEASURING TESTING
Information
Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USI...
Publication number
20210191275
Publication date
Jun 24, 2021
ASML NETHERLANDS B.V.
Raphael Nico Johan STEGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY