Rason Zuo

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Bottom electrode assembly, plasma processing apparatus, and method...
- Patent number 12,094,693
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Jiangtao Pei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner assembly for vacuum treatment apparatus, and vacuum treatment...
- Patent number 11,676,803
- Issue date Jun 13, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant gas delivery assembly, and plasma processing ap...
- Patent number 11,621,149
- Issue date Apr 4, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yilong Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform pumping dual-station vacuum processor
- Patent number 11,387,084
- Issue date Jul 12, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Yuejun Gong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process apparatus with low particle contamination and method...
- Patent number 11,371,141
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant structure for a gas delivery system in a plasma...
- Patent number 11,348,763
- Issue date May 31, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Zengdi Lian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...
- Publication number 20220165551
- Publication date May 26, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Jiangtao PEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD FOR MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL IN...
- Publication number 20220005677
- Publication date Jan 6, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Corrosion-Resistant Gas delivery Assembly, and Plasma Processing Ap...
- Publication number 20210151294
- Publication date May 20, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Yilong SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINER ASSEMBLY FOR VACUUM TREATMENT APPARATUS, AND VACUUM TREATMENT...
- Publication number 20200388467
- Publication date Dec 10, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...
- Publication number 20200381213
- Publication date Dec 3, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Zengdi LIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...
- Publication number 20190194802
- Publication date Jun 27, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Tuqiang NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM PUMPING DUAL-STATION VACUUM PROCESSOR
- Publication number 20190139745
- Publication date May 9, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Yuejun GONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE STRUCTURE FOR ICP ETCHER
- Publication number 20170186585
- Publication date Jun 29, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Rason Zuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE...
- Publication number 20170186592
- Publication date Jun 29, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Bottom electrode assembly, plasma processing apparatus, and method...

Liner assembly for vacuum treatment apparatus, and vacuum treatment...

Corrosion-resistant gas delivery assembly, and plasma processing ap...

Uniform pumping dual-station vacuum processor

Plasma process apparatus with low particle contamination and method...

Corrosion-resistant structure for a gas delivery system in a plasma...

Patents Applicationslast 30 patents

BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...

CONTROL METHOD FOR MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL IN...

Corrosion-Resistant Gas delivery Assembly, and Plasma Processing Ap...

LINER ASSEMBLY FOR VACUUM TREATMENT APPARATUS, AND VACUUM TREATMENT...

CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...

PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...

UNIFORM PUMPING DUAL-STATION VACUUM PROCESSOR

ELECTRODE STRUCTURE FOR ICP ETCHER

MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE...