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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sacrificial protection layer for environmentally sensitive surfaces...
Patent number
12,119,218
Issue date
Oct 15, 2024
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for collapse-free drying of high aspect ratio structures
Patent number
10,008,396
Issue date
Jun 26, 2018
Lam Research Corporation
Stephen Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for drying high aspect ratio structures without...
Patent number
9,466,511
Issue date
Oct 11, 2016
Lam Research Corporation
Ratchana Limary
F26 - DRYING
Information
Patent Grant
Delamination drying apparatus and method
Patent number
8,898,928
Issue date
Dec 2, 2014
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
Publication number
20240429040
Publication date
Dec 26, 2024
LAM RESEARCH CORPORATION
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
Publication number
20240030023
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW CEILING TEMPERATURE HOMOPOLYMERS AS SACRIFICIAL PROTECTION LAYE...
Publication number
20230295412
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Stephen M. SIRARD
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SMALL MOLECULE FILMS FOR SACRIFICIAL BRACING, SURFACE PROTECTION, A...
Publication number
20220328338
Publication date
Oct 13, 2022
LAM RESEARCH CORPORATION
Gregory BLACHUT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES
Publication number
20160099160
Publication date
Apr 7, 2016
LAM RESEARCH CORPORATION
Stephen Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT...
Publication number
20160086829
Publication date
Mar 24, 2016
LAM RESEARCH CORPORATION
Ratchana Limary
B08 - CLEANING
Information
Patent Application
COVERAGE OF HIGH ASPECT RATIO FEATURES USING SPIN-ON DIELECTRIC THR...
Publication number
20160042945
Publication date
Feb 11, 2016
LAM RESEARCH CORPORATION
Ratchana Limary
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELAMINATION DRYING APPARATUS AND METHOD
Publication number
20140101964
Publication date
Apr 17, 2014
LAM RESEARCH CORPORATION
Stephen M. SIRARD
H01 - BASIC ELECTRIC ELEMENTS