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Ratnam Sooriyekumaren
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Silicon-containing compositions for spin-on arc/hardmask materials
Patent number
7,276,327
Issue date
Oct 2, 2007
International Business Machines Corporation
Marie Angelopoulos
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Silicon-containing compositions for spin-on arc/hardmask materials
Publication number
20060058489
Publication date
Mar 16, 2006
International Business Machines Corporation
Marie Angelopoulos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY