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Ravi Kumar
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Providence, RI, US
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Patents Grants
last 30 patents
Information
Patent Grant
Controller for controlling core critical dimension variation using...
Patent number
11,322,416
Issue date
May 3, 2022
Lam Research Corporation
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi zone substrate support for ALD film property correction and t...
Patent number
11,236,422
Issue date
Feb 1, 2022
Lam Research Corporation
Michael Philip Roberts
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Azimuthal critical dimension non-uniformity for double patterning p...
Patent number
11,078,570
Issue date
Aug 3, 2021
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Compensating chamber and process effects to improve critical dimens...
Patent number
10,847,352
Issue date
Nov 24, 2020
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-situ x-ray scatter imaging of battery electrodes
Patent number
10,833,374
Issue date
Nov 10, 2020
Brown University
Christoph Rose-Petruck
G01 - MEASURING TESTING
Information
Patent Grant
Method for controlling core critical dimension variation using flas...
Patent number
10,727,143
Issue date
Jul 28, 2020
Lam Research Corporation
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL
Publication number
20230170195
Publication date
Jun 1, 2023
LAM RESEARCH CORPORATION
Ravi Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...
Publication number
20230002901
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Awnish GUPTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
Publication number
20220305601
Publication date
Sep 29, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
Publication number
20220243332
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
Publication number
20220243323
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
Publication number
20220223440
Publication date
Jul 14, 2022
LAM RESEARCH CORPORATION
Ravi KUMAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
Publication number
20220205105
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Controller for Controlling Core Critical Dimension Variation Using...
Publication number
20200350219
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENS...
Publication number
20200043709
Publication date
Feb 6, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Controlling Core Critical Dimension Variation Using Flas...
Publication number
20200035572
Publication date
Jan 30, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AZIMUTHAL CRITICAL DIMENSION NON-UNIFORMITY FOR DOUBLE PATTERNING P...
Publication number
20200002815
Publication date
Jan 2, 2020
LAM RESEARCH CORPORATION
Pulkit AGARWAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY
Publication number
20190153600
Publication date
May 23, 2019
LAM RESEARCH CORPORATION
Michael Philip Roberts
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU X-RAY SCATTER IMAGING OF BATTERY ELECTRODES
Publication number
20180131044
Publication date
May 10, 2018
Brown University
Christoph Rose-Petruck
G01 - MEASURING TESTING