Ravi Kumar

Person

Providence, RI, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of vacuum during transfer of substrates
- Patent number 12,186,851
- Issue date Jan 7, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Trim and deposition profile control with multi-zone heated substrat...
- Patent number 12,071,689
- Issue date Aug 27, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controller for controlling core critical dimension variation using...
- Patent number 11,322,416
- Issue date May 3, 2022
- Lam Research Corporation
- Pulkit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone substrate support for ALD film property correction and t...
- Patent number 11,236,422
- Issue date Feb 1, 2022
- Lam Research Corporation
- Michael Philip Roberts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Azimuthal critical dimension non-uniformity for double patterning p...
- Patent number 11,078,570
- Issue date Aug 3, 2021
- Lam Research Corporation
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compensating chamber and process effects to improve critical dimens...
- Patent number 10,847,352
- Issue date Nov 24, 2020
- Lam Research Corporation
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ x-ray scatter imaging of battery electrodes
- Patent number 10,833,374
- Issue date Nov 10, 2020
- Brown University
- Christoph Rose-Petruck
- G01 - MEASURING TESTING
Information Patent Grant
Method for controlling core critical dimension variation using flas...
- Patent number 10,727,143
- Issue date Jul 28, 2020
- Lam Research Corporation
- Pulkit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APARATUSES WITH ROTATING MECHANISMS INCLUDING...
- Publication number 20250121465
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20240392443
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20240327973
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL
- Publication number 20230170195
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Ravi Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...
- Publication number 20230002901
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Awnish GUPTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
- Publication number 20220305601
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
- Publication number 20220243332
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...
- Publication number 20220243323
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
- Publication number 20220223440
- Publication date Jul 14, 2022
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20220205105
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Controller for Controlling Core Critical Dimension Variation Using...
- Publication number 20200350219
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Pulkit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENS...
- Publication number 20200043709
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- Pulkit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Controlling Core Critical Dimension Variation Using Flas...
- Publication number 20200035572
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Pulkit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AZIMUTHAL CRITICAL DIMENSION NON-UNIFORMITY FOR DOUBLE PATTERNING P...
- Publication number 20200002815
- Publication date Jan 2, 2020
- LAM RESEARCH CORPORATION
- Pulkit AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY
- Publication number 20190153600
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU X-RAY SCATTER IMAGING OF BATTERY ELECTRODES
- Publication number 20180131044
- Publication date May 10, 2018
- Brown University
- Christoph Rose-Petruck
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Temperature control of a multi-zone pedestal

Use of vacuum during transfer of substrates

Trim and deposition profile control with multi-zone heated substrat...

Controller for controlling core critical dimension variation using...

Multi zone substrate support for ALD film property correction and t...

Azimuthal critical dimension non-uniformity for double patterning p...

Compensating chamber and process effects to improve critical dimens...

In-situ x-ray scatter imaging of battery electrodes

Method for controlling core critical dimension variation using flas...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APARATUSES WITH ROTATING MECHANISMS INCLUDING...

TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL

PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...

USE OF VACUUM DURING TRANSFER OF SUBSTRATES

TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL

USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICO...

RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...

TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...

Controller for Controlling Core Critical Dimension Variation Using...

COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENS...

Method for Controlling Core Critical Dimension Variation Using Flas...

AZIMUTHAL CRITICAL DIMENSION NON-UNIFORMITY FOR DOUBLE PATTERNING P...

MULTI ZONE PEDESTAL FOR ALD FILM PROPERTY CORRECTION AND TUNABILITY

IN-SITU X-RAY SCATTER IMAGING OF BATTERY ELECTRODES