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Raviv YOHANAN
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Qiryat Motzkin, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,862,524
Issue date
Jan 2, 2024
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay design for electron beam and scatterometry overlay measurem...
Patent number
11,720,031
Issue date
Aug 8, 2023
KLA Corporation
Inna Steely-Tarshish
G01 - MEASURING TESTING
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,703,767
Issue date
Jul 18, 2023
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Misregistration target having device-scaled features useful in meas...
Patent number
11,532,566
Issue date
Dec 20, 2022
KLA Corporation
Roie Volkovich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device-like overlay metrology targets displaying Moiré effects
Patent number
11,355,375
Issue date
Jun 7, 2022
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data-driven misregistration parameter configuration and measurement...
Patent number
11,353,493
Issue date
Jun 7, 2022
KLA-Tencor Corporation
Shlomit Katz
G01 - MEASURING TESTING
Information
Patent Grant
System for combined imaging and scatterometry metrology
Patent number
11,067,904
Issue date
Jul 20, 2021
KLA Corporation
Eran Amit
G01 - MEASURING TESTING
Information
Patent Grant
Compound imaging metrology targets
Patent number
10,527,951
Issue date
Jan 7, 2020
KLA-Tencor Corporation
Raviv Yohanan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Identifying registration errors of DSA lines
Patent number
10,401,841
Issue date
Sep 3, 2019
KLA-Tencor Corporation
Roie Volkovich
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for direct self assembly in target design and...
Patent number
10,303,835
Issue date
May 28, 2019
KLA-Tencor Corporation
Eran Amit
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology target for combined imaging and scatterometry metrology
Patent number
10,274,837
Issue date
Apr 30, 2019
KLA-Tencor Corporation
Eran Amit
G01 - MEASURING TESTING
Information
Patent Grant
Metrology targets with filling elements that reduce inaccuracies an...
Patent number
10,002,806
Issue date
Jun 19, 2018
KLA-Tencor Corporation
Nuriel Amir
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20230324810
Publication date
Oct 12, 2023
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220415725
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220413395
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY DESIGN FOR ELECTRON BEAM AND SCATTEROMETRY OVERLAY MEASUREM...
Publication number
20220413394
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL METROLOGY UTILIZING SHORT-WAVE INFRARED WAVELENGTHS
Publication number
20220291143
Publication date
Sep 15, 2022
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
DEVICE-LIKE OVERLAY METROLOGY TARGETS DISPLAYING MOIRÉ EFFECTS
Publication number
20220020625
Publication date
Jan 20, 2022
KLA Corporation
Roie Volkovich
G01 - MEASURING TESTING
Information
Patent Application
Misregistration Target Having Device-Scaled Features Useful in Meas...
Publication number
20220013468
Publication date
Jan 13, 2022
KLA Corporation
Roie Volkovich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA-DRIVEN MISREGISTRATION PARAMETER CONFIGURATION AND MEASUREMENT...
Publication number
20210011073
Publication date
Jan 14, 2021
KLA-Tencor Corporation
Shlomit Katz
G05 - CONTROLLING REGULATING
Information
Patent Application
COMBINED IMAGING AND SCATTEROMETRY METROLOGY
Publication number
20190250521
Publication date
Aug 15, 2019
KLA-Tencor Corporation
Eran AMIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOUND IMAGING METROLOGY TARGETS
Publication number
20160179017
Publication date
Jun 23, 2016
KLA-Tencor Corporation
Raviv YOHANAN
G02 - OPTICS
Information
Patent Application
IDENTIFYING REGISTRATION ERRORS OF DSA LINES
Publication number
20160018819
Publication date
Jan 21, 2016
KLA-Tencor Corporation
Roie VOLKOVICH
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND APPARATUS FOR DIRECT SELF ASSEMBLY IN TARGET DESIGN AND...
Publication number
20150242558
Publication date
Aug 27, 2015
KLA-Tencor Corporation
Eran AMIT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY TARGETS WITH FILLING ELEMENTS THAT REDUCE INACCURACIES AN...
Publication number
20150227675
Publication date
Aug 13, 2015
KLA-Tencor Corporation
Nuriel Amir
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMBINED IMAGING AND SCATTEROMETRY METROLOGY
Publication number
20150177135
Publication date
Jun 25, 2015
KLA-Tencor Corporation
Eran AMIT
G01 - MEASURING TESTING