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Raymond Gerardus Marius Beeren
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Dalhem, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Cleaning device and a lithographic apparatus cleaning method
Patent number
8,011,377
Issue date
Sep 6, 2011
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Lithographic apparatus and lithographic apparatus cleaning method
Patent number
7,969,548
Issue date
Jun 28, 2011
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning device and a lithographic apparatus cleaning method
Patent number
7,900,641
Issue date
Mar 8, 2011
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
Patent number
7,866,330
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Bauke Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
CLEANING DEVICE AND A LITHOGRAPHIC APPARATUS CLEANING METHOD
Publication number
20110292359
Publication date
Dec 1, 2011
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS CLEANING METHOD
Publication number
20110222034
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING DEVICE, A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARA...
Publication number
20110069290
Publication date
Mar 24, 2011
ASML NETHERLANDS B.V.
Bauke JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic cleani...
Publication number
20080284990
Publication date
Nov 20, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning device and a lithographic apparatus cleaning method
Publication number
20080271747
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic appara...
Publication number
20080273181
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic appara...
Publication number
20080271750
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Bauke Jansen
B08 - CLEANING
Information
Patent Application
Lithographic apparatus and lithographic apparatus cleaning method
Publication number
20070285631
Publication date
Dec 13, 2007
ASML Netherland B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY