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Singapore, SG
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and methods for cleaning and drying of wafers
Patent number
8,177,993
Issue date
May 15, 2012
GLOBALFOUNDRIES Singapore Pte. Ltd.
Boon Meng Seah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protruded contact and insertion of inter-layer-dielectric material...
Patent number
7,601,607
Issue date
Oct 13, 2009
Chartered Semiconductor Manufacturing, Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple layer resist scheme implementing etch recipe particular to...
Patent number
7,352,064
Issue date
Apr 1, 2008
International Business Machines Corporation
Nicholas C. M. Fuller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MIM and metal resistor formation at CU beol using only one extra mask
Patent number
6,730,573
Issue date
May 4, 2004
Chartered Semiconductor Manufacturing Ltd.
Chit Hwei Ng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to reduce microloading in metal etching
Patent number
6,548,413
Issue date
Apr 15, 2003
Chartered Semiconductor Manufacturing Ltd.
Paul Kwok Keung Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post metal etch photoresist strip method
Patent number
6,271,115
Issue date
Aug 7, 2001
Chartered Semiconductor Manufacturing Ltd.
Wen Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHODS FOR CLEANING AND DRYING OF WAFERS
Publication number
20120255586
Publication date
Oct 11, 2012
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Boon Meng SEAH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and methods for Cleaning and Drying of wafers
Publication number
20080105653
Publication date
May 8, 2008
Boon Meng Seah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protruded contact and insertion of inter-layer-dielectric material...
Publication number
20070264820
Publication date
Nov 15, 2007
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple Layer Resist Scheme Implementing Etch Recipe Particular to...
Publication number
20060094230
Publication date
May 4, 2006
International Business Machines Corporation
Nicholas C.M. Fuller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MIM AND METAL RESISTOR FORMATION AT CU BEOL USING ONLY ONE EXTRA MASK
Publication number
20040087098
Publication date
May 6, 2004
Chartered Semiconductor Manufacturing Ltd.
Chit Hwei Ng
H01 - BASIC ELECTRIC ELEMENTS