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Raymond Peterson
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Manor, TX, US
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last 30 patents
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Patent Grant
Fault detection and classification (FDC) using a run-to-run controller
Patent number
7,477,960
Issue date
Jan 13, 2009
Tokyo Electron Limited
James E. Willis
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for the monitoring and control of a semiconduc...
Patent number
7,123,980
Issue date
Oct 17, 2006
Tokyo Electron Limited
Merritt Funk
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
Fault detection and classification (FDC) using a run-to-run controller
Publication number
20060184264
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
James E. Willis
G05 - CONTROLLING REGULATING
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Patent Application
Method and apparatus for the monitoring and control of a semiconduc...
Publication number
20050187649
Publication date
Aug 25, 2005
TOKYO ELECTRON LIMITED
Merritt Funk
G05 - CONTROLLING REGULATING