Regis Joseph Kline

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Boonsboro, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Determining tilt angle in patterned arrays of high aspect-ratio str...
- Patent number 11,181,489
- Issue date Nov 23, 2021
- Lam Research Corporation
- William Dean Thompson
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DETERMINING TILT ANGLE IN PATTERNED ARRAYS OF HIGH ASPECT RATIO STR...
- Publication number 20200041426
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- William Dean Thompson
- G01 - MEASURING TESTING