Reiji NIINO

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating semiconductor device, vacuum processing appar...
- Patent number 11,056,349
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,790,135
- Issue date Sep 29, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,755,971
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,748,782
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and vacuum processing...
- Patent number 10,629,448
- Issue date Apr 21, 2020
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device, vacuum processing appar...
- Patent number 10,593,556
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 10,490,405
- Issue date Nov 26, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,446,438
- Issue date Oct 15, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method
- Patent number 9,162,252
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method
- Patent number 8,778,815
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Micro pattern forming method
- Patent number 8,383,522
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning method
- Patent number 8,168,375
- Issue date May 1, 2012
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning method
- Patent number 7,989,354
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning method utilizing SiBN and photolithography
- Patent number 7,754,622
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Pao-Hwa Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment process for wafers
- Patent number 5,500,388
- Issue date Mar 19, 1996
- Tokyo Electron Kabushiki Kaisha
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube
- Patent number 5,380,370
- Issue date Jan 10, 1995
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical boat used for heat treatment of semiconductor wafer and ve...
- Patent number 5,316,472
- Issue date May 31, 1994
- Tokyo Electron Limited
- Reiji Niino
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertically oriented CVD apparatus including gas inlet tube having g...
- Patent number 5,252,133
- Issue date Oct 12, 1993
- Kabushiki Kaisha Toshiba
- Shinji Miyazaki
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Method of Fabricating Semiconductor Device, Vacuum Processing Appar...
- Publication number 20200152475
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190393083
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190122883
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20190122894
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20180286744
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20180264516
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Makoto FUJIKAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method of Manufacturing Semiconductor Device and Vacuum Processing...
- Publication number 20180269069
- Publication date Sep 20, 2018
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...
- Publication number 20180261458
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPAR...
- Publication number 20180025917
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20130316545
- Publication date Nov 28, 2013
- Tatsuya YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM FORMING METHOD
- Publication number 20130316080
- Publication date Nov 28, 2013
- Tatsuya YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MICRO PATTERN FORMING METHOD
- Publication number 20110237082
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100130015
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100112496
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100112796
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Pao-Hwa Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE
- Publication number 20090311634
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Hongyu Yue
- H01 - BASIC ELECTRIC ELEMENTS

Reiji NIINO

Person

Patents Grantslast 30 patents

Method of fabricating semiconductor device, vacuum processing appar...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device and vacuum processing...

Method of fabricating semiconductor device, vacuum processing appar...

Semiconductor device manufacturing method, substrate processing app...

Method of manufacturing semiconductor device

Film forming method

Film forming method

Micro pattern forming method

Patterning method

Patterning method

Patterning method utilizing SiBN and photolithography

Heat treatment process for wafers

Method of cleaning reaction tube

Vertical boat used for heat treatment of semiconductor wafer and ve...

Vertically oriented CVD apparatus including gas inlet tube having g...

Patents Applicationslast 30 patents

Method of Fabricating Semiconductor Device, Vacuum Processing Appar...

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device

Method of Manufacturing Semiconductor Device

FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM

Method of Manufacturing Semiconductor Device and Vacuum Processing...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...

METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPAR...

FILM FORMING METHOD

FILM FORMING METHOD

MICRO PATTERN FORMING METHOD

PATTERNING METHOD

PATTERNING METHOD

PATTERNING METHOD

METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE