Reimar Finken

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Westhausen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure system for semiconductor lithography having an...
- Patent number 11,415,894
- Issue date Aug 16, 2022
- Carl Zeiss SMT GmbH
- Judith Fingerhuth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH A THERMAL MANIPULATOR
- Publication number 20220373899
- Publication date Nov 24, 2022
- Carl Zeiss SMT GMBH
- Stephanus Fengler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY HAVING AN...
- Publication number 20210349399
- Publication date Nov 11, 2021
- Carl Zeiss SMT GMBH
- Judith Fingerhuth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY