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Reinder Teun Plug
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Eindhoven, NL
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last 30 patents
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Patent Application
Lithographic apparatus, combination of lithographic apparatus and p...
Publication number
20080145791
Publication date
Jun 19, 2008
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Metrology tool, system comprising a lithographic apparatus and a me...
Publication number
20070279644
Publication date
Dec 6, 2007
ASML NETHERLANDS B.V.
Reinder Teun Plug
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY