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Reinhard Fendler
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Moritzburg/OT Boxdorf, DE
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last 30 patents
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Patent Grant
Inductively coupled plasma processing apparatus
Patent number
8,021,515
Issue date
Sep 20, 2011
The European Community, Represented by the European Commission
Pascal Colpo
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
Publication number
20090223928
Publication date
Sep 10, 2009
THE EUROPEAN COMMUNITY, REPRESENTED BY THE EUROPEA N COMMISSION
Pascal Colpo
H01 - BASIC ELECTRIC ELEMENTS