Reinhard Fendler

Person

  • Moritzburg/OT Boxdorf, DE

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS

    • Publication number 20090223928
    • Publication date Sep 10, 2009
    • THE EUROPEAN COMMUNITY, REPRESENTED BY THE EUROPEA N COMMISSION
    • Pascal Colpo
    • H01 - BASIC ELECTRIC ELEMENTS