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Reinhard Sellmer
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer cleaning method and apparatus therefore
Patent number
11,810,796
Issue date
Nov 7, 2023
Lam Research AG
Christoph Semmelrock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning a surface
Patent number
8,932,408
Issue date
Jan 13, 2015
Lam Research AG
Reinhard Sellmer
B08 - CLEANING
Information
Patent Grant
Process for planarizing substrates of semiconductor technology
Patent number
7,179,753
Issue date
Feb 20, 2007
Sez AG
Hans-Jurgen Kruwinus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
WAFER CLEANING METHOD AND APPARATUS THEREFORE
Publication number
20210320016
Publication date
Oct 14, 2021
LAM RESEARCH AG
Christoph SEMMELROCK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID MIXTURE AND METHOD FOR ETCHING A SUBSTRATE USING THE LIQUID...
Publication number
20190010397
Publication date
Jan 10, 2019
Lam Research AG
Reinhard Sellmer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING A SURFACE
Publication number
20100012157
Publication date
Jan 21, 2010
SEZ AG
Reinhard Sellmer
B08 - CLEANING
Information
Patent Application
Process for planarizing substrates of semiconductor technology
Publication number
20030087528
Publication date
May 8, 2003
SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLE
Hans-Jurgen Kruwinus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...