Reinhard Voelkel

Follow

Person

Neuchatel, CH

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,575,414
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for optical imaging
- Patent number 9,383,557
- Issue date Jul 5, 2016
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Jacques Duparre
- G02 - OPTICS
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,217,930
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical beam deflecting element, illumination system including same...
- Patent number 9,025,131
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Daniel Runde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Array of microlenses with integrated illumination
- Patent number 8,792,174
- Issue date Jul 29, 2014
- Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung
- Philipp Schmaelzle
- G02 - OPTICS
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 8,395,756
- Issue date Mar 12, 2013
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20160077446
- Publication date Mar 17, 2016
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
Device for Optical Imaging
- Publication number 20130057748
- Publication date Mar 7, 2013
- Jacques Duparre
- G02 - OPTICS
Information Patent Application
OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME...
- Publication number 20120249988
- Publication date Oct 4, 2012
- CARL ZEISS SMT GMBH
- Daniel Runde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRAY OF MICROLENSES WITH INTEGRATED ILLUMINATION
- Publication number 20110025899
- Publication date Feb 3, 2011
- Philipp Schmaelzle
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20090021716
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Johannes Wangler
- G02 - OPTICS