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Reinhold Muhl
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Altdorf, DE
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last 30 patents
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Patent Grant
Process for making masks with structures in the submicron range
Patent number
5,055,383
Issue date
Oct 8, 1991
International Business Machines Corporation
Otto Koblinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of producing integrated semiconductor structures comprising...
Patent number
4,980,317
Issue date
Dec 25, 1990
International Business Machines Corporation
Otto Koblinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process of making via holes in a double-layer insulation
Patent number
4,816,115
Issue date
Mar 28, 1989
International Business Machines Corp.
Eva Horner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask and system for mutually aligning objects in ray exposure systems
Patent number
4,513,203
Issue date
Apr 23, 1985
International Business Machines Corporation
Harald Bohlen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reverse process for making chromium masks using silicon dioxide dry...
Patent number
4,489,146
Issue date
Dec 18, 1984
International Business Machines Corporation
Gunther Bock
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY