Reinhold SCHWARZENBACHER

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KOLBNITZ, AT

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Patents Grantslast 30 patents

Information Patent Grant
Reduction of surface and embedded substrate charge by controlled ex...
- Patent number 10,483,010
- Issue date Nov 19, 2019
- Lam Research AG
- Rafal Dylewicz
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector for use with an apparatus for treating wafer-shaped articles
- Patent number 10,134,611
- Issue date Nov 20, 2018
- Lam Research AG
- Reinhold Schwarzenbacher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,972,514
- Issue date May 15, 2018
- LAM RESEARCH AG
- Dietmar Hammer
- B08 - CLEANING
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,779,979
- Issue date Oct 3, 2017
- Lam Research AG
- Reinhold Schwarzenbacher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,698,029
- Issue date Jul 4, 2017
- Lam Research AG
- Reinhold Schwarzenbacher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for processing wafer-shaped articles
- Patent number 9,484,229
- Issue date Nov 1, 2016
- Lam Research AG
- Otto Lach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for processing wafer shaped articles
- Patent number 8,899,246
- Issue date Dec 2, 2014
- Lam Research AG
- Ante Plazonic
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20170256433
- Publication date Sep 7, 2017
- LAM RESEARCH AG
- Dietmar HAMMER
- B08 - CLEANING
Information Patent Application
DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160376702
- Publication date Dec 29, 2016
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20150243543
- Publication date Aug 27, 2015
- LAM RESEARCH AG
- Reinhold SCHWARZENBACHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20150235876
- Publication date Aug 20, 2015
- LAM RESEARCH AG
- Reinhold SCHWARZENBACHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLECTOR FOR USE WITH AN APPARATUS FOR TREATING WAFER-SHAPED ARTICLES
- Publication number 20140283935
- Publication date Sep 25, 2014
- LAM RESEARCH AG
- Reinhold SCHWARZENBACHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20140053982
- Publication date Feb 27, 2014
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- B44 - DECORATIVE ARTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER SHAPED ARTICLES
- Publication number 20130125379
- Publication date May 23, 2013
- LAM RESEARCH AG
- Ante PLAZONIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130118535
- Publication date May 16, 2013
- LAM RESEARCH AB
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS

Reinhold SCHWARZENBACHER

Person

Patents Grantslast 30 patents

Reduction of surface and embedded substrate charge by controlled ex...

Collector for use with an apparatus for treating wafer-shaped articles

Apparatus for liquid treatment of wafer shaped articles

Apparatus for liquid treatment of wafer shaped articles

Method and apparatus for processing wafer-shaped articles

Device and method for processing wafer-shaped articles

Device and method for processing wafer shaped articles

Patents Applicationslast 30 patents

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

COLLECTOR FOR USE WITH AN APPARATUS FOR TREATING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

DEVICE AND METHOD FOR PROCESSING WAFER SHAPED ARTICLES

DEVICE AND METHOD FOR PROCESSING WAFER-SHAPED ARTICLES