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Reinhold Walser
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Utzberg Nieder-Klingen, DE
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Patents Grants
last 30 patents
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Patent Grant
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Patent number
8,902,406
Issue date
Dec 2, 2014
Carl Zeiss SMT GmbH
Reinhold Walser
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
PROJECTION OBJECTIVE
Publication number
20110141446
Publication date
Jun 16, 2011
Carl Zeiss SMT GMBH
Reinhold Walser
G02 - OPTICS