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Reinier PANNEKOEK
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Helden, NL
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Patents Grants
last 30 patents
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Patent Grant
Substrate plate for MEMS devices
Patent number
9,856,140
Issue date
Jan 2, 2018
Oce-Technologies B.V.
Maikel A. J. Huygens
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
SUBSTRATE PLATE FOR MEMS DEVICES
Publication number
20150102835
Publication date
Apr 16, 2015
OCE-TECHNOLOGIES B.V.
Maikel A.J. HUYGENS
B81 - MICRO-STRUCTURAL TECHNOLOGY