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Reizo Nunozawa
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
9,437,465
Issue date
Sep 6, 2016
Hitachi Kokusai Electric Inc.
Satoru Takahata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
8,904,955
Issue date
Dec 9, 2014
Hitachi Kokusai Electric, Inc.
Makoto Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
8,443,484
Issue date
May 21, 2013
Hitachi Kokusai Electric Inc.
Yukio Ozaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20150371914
Publication date
Dec 24, 2015
Hitachi Kokusai Electric Inc.
Yukio OZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20100144145
Publication date
Jun 10, 2010
Hitachi Kokusai Electric Inc.
Satoru TAKAHATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20100055808
Publication date
Mar 4, 2010
Hitachi Kokusai Electric, Inc.
Yukio Ozaki
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20090229634
Publication date
Sep 17, 2009
Makoto Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20090044749
Publication date
Feb 19, 2009
Hitachi Kokusai Electric Inc.
Yukio Ozaki
H01 - BASIC ELECTRIC ELEMENTS