Rekha Padmanabhan

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Peabody, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Predicting dose repeatability in an ion implantation
- Patent number 7,820,987
- Issue date Oct 26, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PREDICTING DOSE REPEATABILITY IN AN ION IMPLANTATION
- Publication number 20090162953
- Publication date Jun 25, 2009
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS