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Rekha PADMANABHAN
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Lower dose rate ion implantation using a wider ion beam
Patent number
9,748,072
Issue date
Aug 29, 2017
Advanced Ion Beam Technology, Inc.
Zhimin Wan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for ion implantation
Patent number
9,431,247
Issue date
Aug 30, 2016
Advanced Ion Beam Technology, Inc.
Zhimin Wan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
LOWER DOSE RATE ION IMPLANTATION USING A WIDER ION BEAM
Publication number
20150371857
Publication date
Dec 24, 2015
ADVANCED ION BEAM TECHNOLOGY, INC.
Zhimin WAN
H01 - BASIC ELECTRIC ELEMENTS