Rekha Rajaram

Person

Scarsdale, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,392,560
- Issue date Aug 27, 2019
- Entegris, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for making robust replacement metal gates and multi-thresho...
- Patent number 10,170,373
- Issue date Jan 1, 2019
- GLOBALFOUNDRIES Inc.
- Balaji Kannan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning dopant films in high-k dielectrics in a soft m...
- Patent number 9,824,930
- Issue date Nov 21, 2017
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning dopant films in high-k dielectrics in a soft m...
- Patent number 9,721,842
- Issue date Aug 1, 2017
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 9,546,321
- Issue date Jan 17, 2017
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of patterning dopant films in high-K dielectrics in a soft m...
- Patent number 9,472,419
- Issue date Oct 18, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for transistors using gate stack dopants with...
- Patent number 9,418,995
- Issue date Aug 16, 2016
- GLOBALFOUNDRIES Inc.
- Balaji Kannan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal stack for reduced gate resistance
- Patent number 9,343,372
- Issue date May 17, 2016
- GLOBALFOUNDRIES, INC.
- Ruqiang Bao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning dopant films in high-k dielectrics in a soft m...
- Patent number 9,330,938
- Issue date May 3, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aqueous cleaner for the removal of post-etch residues
- Patent number 9,063,431
- Issue date Jun 23, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facilities manifold with proximity sensor
- Patent number 9,031,700
- Issue date May 12, 2015
- Intermolecular, Inc.
- Makonnen Payne
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20170260449
- Publication date Sep 14, 2017
- Entegris, Inc.
- Jeffrey A. BARNES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...
- Publication number 20160351452
- Publication date Dec 1, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...
- Publication number 20160190015
- Publication date Jun 30, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR TRANSISTORS USING GATE STACK DOPANTS WITH...
- Publication number 20160104707
- Publication date Apr 14, 2016
- GLOBALFOUNDRIES INC.
- Balaji Kannan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MAKING ROBUST REPLACEMENT METAL GATES AND MULTI-THRESHO...
- Publication number 20160086860
- Publication date Mar 24, 2016
- GLOBALFOUNDRIES INC.
- Balaji Kannan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...
- Publication number 20160049337
- Publication date Feb 18, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...
- Publication number 20160027664
- Publication date Jan 28, 2016
- International Business Machines Corporation
- Takashi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
- Publication number 20150307818
- Publication date Oct 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION
- Publication number 20150162213
- Publication date Jun 11, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20150027978
- Publication date Jan 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
- Publication number 20130296214
- Publication date Nov 7, 2013
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Facilites Manifold with Proximity Sensor
- Publication number 20130090765
- Publication date Apr 11, 2013
- Intermolecular, Inc.
- Makonnen Payne
- H01 - BASIC ELECTRIC ELEMENTS

Rekha Rajaram

Person

Patents Grantslast 30 patents

Compositions and methods for selectively etching titanium nitride

Methods for making robust replacement metal gates and multi-thresho...

Method of patterning dopant films in high-k dielectrics in a soft m...

Method of patterning dopant films in high-k dielectrics in a soft m...

Compositions and methods for selectively etching titanium nitride

Method of patterning dopant films in high-K dielectrics in a soft m...

Method and structure for transistors using gate stack dopants with...

Metal stack for reduced gate resistance

Method of patterning dopant films in high-k dielectrics in a soft m...

Aqueous cleaner for the removal of post-etch residues

Facilities manifold with proximity sensor

Patents Applicationslast 30 patents

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...

METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...

METHOD AND STRUCTURE FOR TRANSISTORS USING GATE STACK DOPANTS WITH...

METHODS FOR MAKING ROBUST REPLACEMENT METAL GATES AND MULTI-THRESHO...

METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...

METHOD OF PATTERNING DOPANT FILMS IN HIGH-K DIELECTRICS IN A SOFT M...

AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES

Facilites Manifold with Proximity Sensor