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Rekha Ranganathan
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Point-of-use exhaust by-product reactor
Patent number
6,368,567
Issue date
Apr 9, 2002
Applied Materials, Inc.
Paul B. Comita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vented lower liner for heating exhaust gas from a single substrate...
Patent number
6,254,686
Issue date
Jul 3, 2001
Applied Materials, Inc.
Paul B. Comita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for heating exhaust gas in a substrate reactor
Patent number
6,153,260
Issue date
Nov 28, 2000
Applied Materials, Inc.
Paul B. Comita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of cleaning CVD cold-wall chamber and exhaust lines
Patent number
6,042,654
Issue date
Mar 28, 2000
Applied Materials, Inc.
Paul B. Comita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...