Remco DIRKS

Person

Deurne, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 11,994,806
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Alexandru Onose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a plurality of metrology apparatuses, method...
- Patent number 11,556,060
- Issue date Jan 17, 2023
- ASML Netherlands B.V.
- Seyed Iman Mossavat
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for simulating interaction of radiation with...
- Patent number 11,429,763
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Remco Dirks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and metrology apparatus for determining estimated scattered...
- Patent number 11,392,043
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Seyed Iman Mossavat
- G01 - MEASURING TESTING
Information Patent Grant
Statistical hierarchical reconstruction from metrology data
- Patent number 10,627,213
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Seyed Iman Mossavat
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for simulating interaction of radiation with...
- Patent number 10,592,618
- Issue date Mar 17, 2020
- ASML Netherlands B.V.
- Remco Dirks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process flagging and cluster detection without requiring reconstruc...
- Patent number 10,151,985
- Issue date Dec 11, 2018
- ASML Netherlands B.V.
- Remco Dirks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for calculating electromagnetic scattering pr...
- Patent number 8,706,455
- Issue date Apr 22, 2014
- ASML Netherlands B.V.
- Martijn Constant Van Beurden
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for determining electromagnetic scattering pr...
- Patent number 8,645,109
- Issue date Feb 4, 2014
- ASML Netherlands B.V.
- Remco Dirks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...
- Publication number 20240385531
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Alexandru ONOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
- Publication number 20240354552
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Alexandru ONOSE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
- Publication number 20240060906
- Publication date Feb 22, 2024
- ASML NETHERLANDS B.V.
- Bart Jacobus Martinus TIEMERSMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
- Publication number 20240061347
- Publication date Feb 22, 2024
- ASML NETHERLANDS B.V.
- Alexandru ONOSE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MAPPING METRICS BETWEEN MANUFACTURING SYSTEMS
- Publication number 20230288815
- Publication date Sep 14, 2023
- ASML NETHERLANDS B.V.
- Siebe Tjerk DE ZWART
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...
- Publication number 20220171290
- Publication date Jun 2, 2022
- ASML NETHERLANDS B.V.
- Alexandru ONOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Simulating Interaction of Radiation with...
- Publication number 20200202054
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Remco DIRKS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of Calibrating a Plurality of Metrology Apparatuses, Method...
- Publication number 20200110341
- Publication date Apr 9, 2020
- ASML NETHERLANDS B.V.
- Seyed Iman MOSSAVAT
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and Metrology Apparatus for Determining Estimated Scattered...
- Publication number 20200057386
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Seyed Iman MOSSAVAT
- G01 - MEASURING TESTING
Information Patent Application
PROCESS FLAGGING AND CLUSTER DETECTION WITHOUT REQUIRING RECONSTRUC...
- Publication number 20170176869
- Publication date Jun 22, 2017
- ASML NETHERLANDS B.V.
- Remco DIRKS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
STATISTICAL HIERARCHICAL RECONSTRUCTION FROM METROLOGY DATA
- Publication number 20170160074
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Seyed Iman MOSSAVAT
- G01 - MEASURING TESTING
Information Patent Application
Methods And Apparatus For Simulating Interaction Of Radiation With...
- Publication number 20170017738
- Publication date Jan 19, 2017
- ASML NETHERLANDS B.V.
- Remco DIRKS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Apparatus for Determining Electromagnetic Scattering Pr...
- Publication number 20110137625
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Remco Dirks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Calculating Electromagnetic Scattering Pr...
- Publication number 20110098992
- Publication date Apr 28, 2011
- ASML NETHERLANDS B.V.
- Martijn Constant VAN BEURDEN
- G01 - MEASURING TESTING

Remco DIRKS

Person

Patents Grantslast 30 patents

Metrology method and apparatus, computer program and lithographic s...

Method of calibrating a plurality of metrology apparatuses, method...

Methods and apparatus for simulating interaction of radiation with...

Method and metrology apparatus for determining estimated scattered...

Statistical hierarchical reconstruction from metrology data

Methods and apparatus for simulating interaction of radiation with...

Process flagging and cluster detection without requiring reconstruc...

Methods and apparatus for calculating electromagnetic scattering pr...

Methods and apparatus for determining electromagnetic scattering pr...

Patents Applicationslast 30 patents

METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...

MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...

MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...

MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...

MAPPING METRICS BETWEEN MANUFACTURING SYSTEMS

METROLOGY METHOD AND APPARATUS, COMPUTER PROGRAM AND LITHOGRAPHIC S...

Methods and Apparatus for Simulating Interaction of Radiation with...

Method of Calibrating a Plurality of Metrology Apparatuses, Method...

Method and Metrology Apparatus for Determining Estimated Scattered...

PROCESS FLAGGING AND CLUSTER DETECTION WITHOUT REQUIRING RECONSTRUC...

STATISTICAL HIERARCHICAL RECONSTRUCTION FROM METROLOGY DATA

Methods And Apparatus For Simulating Interaction Of Radiation With...

Methods and Apparatus for Determining Electromagnetic Scattering Pr...

Methods and Apparatus for Calculating Electromagnetic Scattering Pr...