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Remi Thollot
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Cruseilles, FR
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last 30 patents
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Patent Grant
Method and device for monitoring the contamination of substrate wafers
Patent number
7,790,479
Issue date
Sep 7, 2010
Alcatel
Arnaud Favre
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and device for monitoring the contamination of substrate wafers
Publication number
20060292037
Publication date
Dec 28, 2006
ALCATEL
Arnaud Favre
H01 - BASIC ELECTRIC ELEMENTS