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Remko Wakker
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,019,476
Issue date
Apr 28, 2015
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,978,308
Issue date
Jul 12, 2011
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and position sensor
Patent number
7,830,495
Issue date
Nov 9, 2010
ASML Netherlands B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and method for masking a substrate
Patent number
7,808,612
Issue date
Oct 5, 2010
ASML Netherlands B.V.
Remko Wakker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with mask to prevent exposure of peripheral...
Patent number
7,777,863
Issue date
Aug 17, 2010
ASML Netherlands B.V.
Erik Marie José Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110222045
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and position sensor
Publication number
20090015246
Publication date
Jan 15, 2009
ASML NETHERLANDS B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus
Publication number
20080297748
Publication date
Dec 4, 2008
ASML NETHERLANDS B.V.
Erik Marie Jose Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for masking a substrate
Publication number
20080246935
Publication date
Oct 9, 2008
ASML NETHERLANDS B.V.
Remko Wakker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070263200
Publication date
Nov 15, 2007
ASML NETHERLANDS B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY