Rempei Nakata

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate storage container and substrate storage container mountin...
- Patent number 9,698,034
- Issue date Jul 4, 2017
- Kabushiki Kaisha Toshiba
- Yuuichi Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage container and substrate storage container mountin...
- Patent number 9,659,800
- Issue date May 23, 2017
- Kabushiki Kaisha Toshiba
- Yuuichi Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 8,071,157
- Issue date Dec 6, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,799,368
- Issue date Sep 21, 2010
- Kabushiki Kaisha Toshiba
- Shinichi Ito
Information Patent Grant
Manufacturing method for semiconductor device
- Patent number 7,785,984
- Issue date Aug 31, 2010
- Kabushiki Kaisha Toshiba
- Nobuhide Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,604,832
- Issue date Oct 20, 2009
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,534,717
- Issue date May 19, 2009
- Kabushiki Kaisha Toshiba
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming insulating film, method of manufacturing semicond...
- Patent number 7,446,061
- Issue date Nov 4, 2008
- Kabushiki Kaihsa Toshiba
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,312,018
- Issue date Dec 25, 2007
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device fabrication method
- Patent number 7,094,681
- Issue date Aug 22, 2006
- Kabushiki Kaisha Toshiba
- Keiji Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,052,971
- Issue date May 30, 2006
- Kabushiki Kaisha Toshiba
- Yukio Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and semiconductor device
- Patent number 6,962,870
- Issue date Nov 8, 2005
- Kabushiki Kaisha Toshiba
- Hideaki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas circulating-processing apparatus
- Patent number 6,938,638
- Issue date Sep 6, 2005
- Kabushiki Kaisha Toshiba
- Hiroshi Kubota
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 6,828,684
- Issue date Dec 7, 2004
- Kabushiki Kaisha Toshiba
- Hiroshi Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 6,800,569
- Issue date Oct 5, 2004
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming insulating film and method of manufacturing semic...
- Patent number 6,784,092
- Issue date Aug 31, 2004
- Kabushiki Kaisha Toshiba
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,746,969
- Issue date Jun 8, 2004
- Kabushiki Kaisha Toshiba
- Miyoko Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a low dielectric insulation layer
- Patent number 6,703,302
- Issue date Mar 9, 2004
- Kabushiki Kaisha Toshiba
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming coating film, method of manufacturing semiconduct...
- Patent number 6,645,881
- Issue date Nov 11, 2003
- Kabushiki Kaisha Toshiba
- Nobuhide Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 6,566,261
- Issue date May 20, 2003
- Kabushiki Kaisha Toshiba
- Hiroshi Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming insulating film and process for producing semicon...
- Patent number 6,558,747
- Issue date May 6, 2003
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Apparatus and method for manufacturing a semiconductor device
- Patent number 6,534,870
- Issue date Mar 18, 2003
- Kabushiki Kaisha Toshiba
- Yoshiaki Shimooka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 6,458,713
- Issue date Oct 1, 2002
- Kabushiki Kaisha Toshiba
- Nobuhide Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device having low dielectric...
- Patent number 6,436,849
- Issue date Aug 20, 2002
- Kabushiki Kaisha Toshiba
- Masahiko Hasunuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polisher used in the method
- Patent number 6,419,557
- Issue date Jul 16, 2002
- Kabushiki Kaisha Toshiba
- Haruki Nojo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Polishing method and polisher used in the method
- Patent number 6,224,464
- Issue date May 1, 2001
- Kabushiki Kaisha Toshiba
- Haruki Nojo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,096,631
- Issue date Aug 1, 2000
- Kabushiki Kaisha Toshiba
- Kenro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device polishing apparatus having improved polishing...
- Patent number 6,059,920
- Issue date May 9, 2000
- Kabushiki Kaisha Toshiba
- Haruki Nojo
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for generating ozone and methods of its use
- Patent number 5,792,326
- Issue date Aug 11, 1998
- Minoru Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ozonizer
- Patent number 5,794,114
- Issue date Aug 11, 1998
- Ebara Corporation
- Minoru Harada
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND GAS-LIQUID SEPARATING APPARATUS
- Publication number 20190291040
- Publication date Sep 26, 2019
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS AND EXHAUST GAS TREATMENT APPARATUS
- Publication number 20190083918
- Publication date Mar 21, 2019
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160348238
- Publication date Dec 1, 2016
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate Storage Container and Substrate Storage Container Mountin...
- Publication number 20160035606
- Publication date Feb 4, 2016
- Kabushiki Kaisha Toshiba
- Yuuichi KURODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER CONTROL EQUIPMENT, POWER CONTROL SYSTEM, AND POWER CONTROL ME...
- Publication number 20140067141
- Publication date Mar 6, 2014
- Kabushiki Kaisha Toshiba
- Toshikatsu MASUDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110212255
- Publication date Sep 1, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110008545
- Publication date Jan 13, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20080090001
- Publication date Apr 17, 2008
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming silicon oxide layer
- Publication number 20080009143
- Publication date Jan 10, 2008
- Nobuhide Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing method for semiconductor device
- Publication number 20080003775
- Publication date Jan 3, 2008
- Nobuhide Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming insulating film, method of manufacturing semicond...
- Publication number 20070128865
- Publication date Jun 7, 2007
- Kabushiki Kaisha Toshiba
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20050250311
- Publication date Nov 10, 2005
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20050026456
- Publication date Feb 3, 2005
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20050022732
- Publication date Feb 3, 2005
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device and semiconductor device
- Publication number 20040175930
- Publication date Sep 9, 2004
- Hideaki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method for manufacturing the same
- Publication number 20040135254
- Publication date Jul 15, 2004
- Keiji Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20030211756
- Publication date Nov 13, 2003
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20030181041
- Publication date Sep 25, 2003
- Kabushiki Kaisha Toshiba
- Hiroshi Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming low dielectric constant insulating layer and meth...
- Publication number 20030143847
- Publication date Jul 31, 2003
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming coating film, method of manufacturing semiconduct...
- Publication number 20030139063
- Publication date Jul 24, 2003
- Nobuhide Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20030022522
- Publication date Jan 30, 2003
- Yukio Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20020173138
- Publication date Nov 21, 2002
- Kabushiki Kaisha Toshiba
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming insulating film and method of manufacturing semic...
- Publication number 20020142623
- Publication date Oct 3, 2002
- Kabushiki Kaisha Toshiba
- Hideshi Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas circulating-processing apparatus
- Publication number 20020134429
- Publication date Sep 26, 2002
- Hiroshi Kubota
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of forming insulating film and process for producing semicon...
- Publication number 20020086169
- Publication date Jul 4, 2002
- Kabushiki Kaisha Toshiba
- Rempei Nakata
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20020081863
- Publication date Jun 27, 2002
- Miyoko Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20020050647
- Publication date May 2, 2002
- Kabushiki Kaisha Toshiba
- Hiroshi Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING LOW DIELECTRIC...
- Publication number 20020037655
- Publication date Mar 28, 2002
- Kabushiki Kaisha Toshiba
- Masahiko Hasunuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing method and polisher used in the method
- Publication number 20010034191
- Publication date Oct 25, 2001
- KABUSHIKI KAISHA TOSHIBA
- Haruki Nojo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Rempei Nakata

Person

Patents Grantslast 30 patents

Substrate storage container and substrate storage container mountin...

Substrate storage container and substrate storage container mountin...

Film forming method, film forming apparatus, pattern forming method...

Film forming method, film forming apparatus, pattern forming method...

Manufacturing method for semiconductor device

Film forming method, film forming apparatus, pattern forming method...

Method of manufacturing semiconductor device

Method of forming insulating film, method of manufacturing semicond...

Film forming method, film forming apparatus, pattern forming method...

Semiconductor device fabrication method

Method for manufacturing semiconductor device

Method of manufacturing semiconductor device and semiconductor device

Gas circulating-processing apparatus

Semiconductor device and method of manufacturing the same

Film forming method, film forming apparatus, pattern forming method...

Method of forming insulating film and method of manufacturing semic...

Method of manufacturing semiconductor device

Method of making a low dielectric insulation layer

Method of forming coating film, method of manufacturing semiconduct...

Semiconductor device and method of manufacturing the same

Method of forming insulating film and process for producing semicon...

Apparatus and method for manufacturing a semiconductor device

Method for manufacturing semiconductor device

Method for manufacturing semiconductor device having low dielectric...

Polishing method and polisher used in the method

Polishing method and polisher used in the method

Method of manufacturing semiconductor device

Semiconductor device polishing apparatus having improved polishing...

Method and apparatus for generating ozone and methods of its use

Ozonizer

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND GAS-LIQUID SEPARATING APPARATUS

MANUFACTURING APPARATUS AND EXHAUST GAS TREATMENT APPARATUS

FILM FORMING APPARATUS

Substrate Storage Container and Substrate Storage Container Mountin...

POWER CONTROL EQUIPMENT, POWER CONTROL SYSTEM, AND POWER CONTROL ME...

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

Film forming method, film forming apparatus, pattern forming method...

Method of forming silicon oxide layer

Manufacturing method for semiconductor device

Method of forming insulating film, method of manufacturing semicond...

Method of manufacturing semiconductor device

Film forming method, film forming apparatus, pattern forming method...

Film forming method, film forming apparatus, pattern forming method...

Method of manufacturing semiconductor device and semiconductor device

Semiconductor device and method for manufacturing the same

Film forming method, film forming apparatus, pattern forming method...

Semiconductor device and method of manufacturing the same

Method of forming low dielectric constant insulating layer and meth...

Method of forming coating film, method of manufacturing semiconduct...

Method for manufacturing semiconductor device

Method for manufacturing a semiconductor device

Method of forming insulating film and method of manufacturing semic...

Gas circulating-processing apparatus

Method of forming insulating film and process for producing semicon...

Method of manufacturing semiconductor device

Semiconductor device and method of manufacturing the same

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING LOW DIELECTRIC...

Polishing method and polisher used in the method