REN-GUAN DUAN

Person

HSINCHU, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Multilayer ALD coating for critical components in process chamber
- Patent number 12,049,697
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240384401
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORINE-CONTAINING ELASTOMER COMPOSITION AND METHOD FOR MAKING CUR...
- Publication number 20240067796
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-MING HUANG
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...
- Publication number 20240060173
- Publication date Feb 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240043992
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REMOVING A BY-PRODUCT FROM A COMPONENT OF A SEMICONDUCTOR...
- Publication number 20240014029
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- REN-GUAN DUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC ARTICLE, SEMICONDUCTOR APPARATUS FOR MANUFACTURING A SEMICO...
- Publication number 20240010566
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- REN-GUAN DUAN
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

REN-GUAN DUAN

Person

Patents Grantslast 30 patents

Multilayer ALD coating for critical components in process chamber

Patents Applicationslast 30 patents

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

FLUORINE-CONTAINING ELASTOMER COMPOSITION AND METHOD FOR MAKING CUR...

SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

METHOD OF REMOVING A BY-PRODUCT FROM A COMPONENT OF A SEMICONDUCTOR...

CERAMIC ARTICLE, SEMICONDUCTOR APPARATUS FOR MANUFACTURING A SEMICO...