Ren ZHOU

Person

Shenyang, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method of temperature measurement used in radio-frequency processin...
- Patent number 11,562,891
- Issue date Jan 24, 2023
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer pedestal with contact array
- Patent number 11,437,253
- Issue date Sep 6, 2022
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer susceptor apparatus with thermal insulation and method for ma...
- Patent number 11,088,012
- Issue date Aug 10, 2021
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock chamber and the cluster tool system using the same
- Patent number 10,497,591
- Issue date Dec 3, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waffer pedestal and support structure thereof
- Patent number 10,410,909
- Issue date Sep 10, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOAD LOCK CHAMBER AND CLEANING METHOD THEREFOR, AND SEMICONDUCTOR D...
- Publication number 20250191949
- Publication date Jun 12, 2025
- JIANGSU LEADMICRO NANO-TECHNOLOGY CO., LTD.
- Ren ZHOU
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250179641
- Publication date Jun 5, 2025
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Ren ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20230274957
- Publication date Aug 31, 2023
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD
- Publication number 20220351942
- Publication date Nov 3, 2022
- PIOTECH INC.
- Zhuo Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PEDESTAL WITH CONTACT ARRAY
- Publication number 20200381270
- Publication date Dec 3, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20200203197
- Publication date Jun 25, 2020
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...
- Publication number 20200176231
- Publication date Jun 4, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...
- Publication number 20200161166
- Publication date May 21, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...
- Publication number 20190341280
- Publication date Nov 7, 2019
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF
- Publication number 20190096736
- Publication date Mar 28, 2019
- PIOTECH CO., LTD.
- Ren Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME
- Publication number 20170271187
- Publication date Sep 21, 2017
- PIOTECH CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method of temperature measurement used in radio-frequency processin...

Wafer pedestal with contact array

Wafer susceptor apparatus with thermal insulation and method for ma...

Load lock chamber and the cluster tool system using the same

Waffer pedestal and support structure thereof

Patents Applicationslast 30 patents

LOAD LOCK CHAMBER AND CLEANING METHOD THEREFOR, AND SEMICONDUCTOR D...

SEMICONDUCTOR DEVICE

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD

WAFER PEDESTAL WITH CONTACT ARRAY

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...

WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...

WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...

WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF

LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME