Ren Zhou

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sealed elastomer bonded Si electrodes and the like for reduced part...
- Patent number 8,789,493
- Issue date Jul 29, 2014
- Lam Research Corporation
- Daxing Ren
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method for point of use delivery, control and mixing che...
- Patent number 7,054,719
- Issue date May 30, 2006
- Lam Research Corporation
- Xuyen Pham
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for distributing a polishing fluid
- Patent number 7,040,970
- Issue date May 9, 2006
- Lam Research Corporation
- Simon McClatchie
- B24 - GRINDING POLISHING
Information Patent Grant
Methods of and apparatus for controlling polishing surface characte...
- Patent number 7,040,954
- Issue date May 9, 2006
- Lam Research Corporation
- Simon McClatchie
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and systems for controlling belt surface temperature and sl...
- Patent number 6,953,750
- Issue date Oct 11, 2005
- Lam Research Corporation
- Patrick P. H. Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for heating polishing pad
- Patent number 6,896,586
- Issue date May 24, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
System, method and apparatus for applying liquid to a CMP polishing...
- Patent number 6,872,128
- Issue date Mar 29, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head having location optimized vacuum holes
- Patent number 6,821,195
- Issue date Nov 23, 2004
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for point of use delivery, control and mixing che...
- Patent number 6,732,017
- Issue date May 4, 2004
- LAM Research Corp.
- Xuyen Pham
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD
- Publication number 20240203775
- Publication date Jun 20, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Ren ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sealed elastomer bonded Si electrodes and the like for reduced part...
- Publication number 20070187038
- Publication date Aug 16, 2007
- Daxing Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for distributing a polishing fluid
- Publication number 20060014478
- Publication date Jan 19, 2006
- Simon McClatchie
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR APPLYING LIQUID TO A CMP POLISHING...
- Publication number 20050070212
- Publication date Mar 31, 2005
- LAM RESEARCH CORPORATION
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Application
System and method for point of use delivery, control and mixing che...
- Publication number 20040199293
- Publication date Oct 7, 2004
- LAM RESEARCH CORPORATION
- Xuyen Pham
- G05 - CONTROLLING REGULATING
Information Patent Application
Chemical mechanical polishing atomizing rinse system
- Publication number 20040162007
- Publication date Aug 19, 2004
- Ky Phan
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for heating polishing pad
- Publication number 20030186623
- Publication date Oct 2, 2003
- Lam Research Corp.
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Application
System and method for point of use delivery, control and mixing che...
- Publication number 20030158630
- Publication date Aug 21, 2003
- LAM RESEARCH CORPORATION
- Xuyen Pham
- G05 - CONTROLLING REGULATING

Person

Patents Grantslast 30 patents

Sealed elastomer bonded Si electrodes and the like for reduced part...

System and method for point of use delivery, control and mixing che...

Apparatus and method for distributing a polishing fluid

Methods of and apparatus for controlling polishing surface characte...

Methods and systems for controlling belt surface temperature and sl...

Method and apparatus for heating polishing pad

System, method and apparatus for applying liquid to a CMP polishing...

Carrier head having location optimized vacuum holes

System and method for point of use delivery, control and mixing che...

Patents Applicationslast 30 patents

WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD

Sealed elastomer bonded Si electrodes and the like for reduced part...

Apparatus and method for distributing a polishing fluid

SYSTEM, METHOD AND APPARATUS FOR APPLYING LIQUID TO A CMP POLISHING...

System and method for point of use delivery, control and mixing che...

Chemical mechanical polishing atomizing rinse system

Method and apparatus for heating polishing pad

System and method for point of use delivery, control and mixing che...