Rene Brulc

Follow

Person

Hoechst, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum chamber system for semiconductor processing
- Patent number 8,097,084
- Issue date Jan 17, 2012
- VAT Holding AG
- Friedrich Geiser
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Vacuum chamber system for semiconductor processing
- Publication number 20070186851
- Publication date Aug 16, 2007
- VAT HOLDING AG
- Friedrich Geiser
- H01 - BASIC ELECTRIC ELEMENTS