Rene E. LeBlanc

Person

Branford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for preventing the premature mixture of reacta...
- Patent number 6,368,987
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Stanislaw Kopacz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for producing thin films by low temperature plasma-enhanc...
- Patent number 6,220,202
- Issue date Apr 24, 2001
- Tokyo Electron Limited
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for preventing the premature mixture of reacta...
- Patent number 6,161,500
- Issue date Dec 19, 2000
- Tokyo Electron Limited
- Stanislaw Kopacz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing thin films by low temperature plasma-enhanced...
- Patent number 5,866,213
- Issue date Feb 2, 1999
- Tokyo Electron Limited
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing titanium thin films by low temperature plasma-...
- Patent number 5,716,870
- Issue date Feb 10, 1998
- Sony Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing titanium-containing thin films by low temperat...
- Patent number 5,665,640
- Issue date Sep 9, 1997
- Sony Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for producing thin films by low temperature plasma-enhanc...
- Patent number 5,567,243
- Issue date Oct 22, 1996
- Sony Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating susceptor semiconductor wafer processing cluster tool modu...
- Patent number 5,370,739
- Issue date Dec 6, 1994
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing method and apparatus with heat and g...
- Patent number 5,356,476
- Issue date Oct 18, 1994
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing CVD reactor apparatus comprising con...
- Patent number 5,273,588
- Issue date Dec 28, 1993
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rene E. LeBlanc

Person

Patents Grantslast 30 patents

Apparatus and method for preventing the premature mixture of reacta...

Apparatus for producing thin films by low temperature plasma-enhanc...

Apparatus and method for preventing the premature mixture of reacta...

Method for producing thin films by low temperature plasma-enhanced...

Method for producing titanium thin films by low temperature plasma-...

Method for producing titanium-containing thin films by low temperat...

Apparatus for producing thin films by low temperature plasma-enhanc...

Rotating susceptor semiconductor wafer processing cluster tool modu...

Semiconductor wafer processing method and apparatus with heat and g...

Semiconductor wafer processing CVD reactor apparatus comprising con...