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Rene Hubert Jacobus Carpaij
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Vught, NL
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last 30 patents
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Patent Grant
Method to determine the value of process parameters based on scatte...
Patent number
8,773,657
Issue date
Jul 8, 2014
ASML Netherlands B.V.
Hans Van Der Laan
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method to Determine the Value of Process Parameters BAsed on Scatte...
Publication number
20070222979
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Hans Van Der Laan
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050264790
Publication date
Dec 1, 2005
ASML NETHERLANDS B.V.
Maurice Henricus Franciscus Janssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method to determine the value of process parameters based on scatte...
Publication number
20050185174
Publication date
Aug 25, 2005
ASML NETHERLANDS B.V.
Hans Van Der Laan
G01 - MEASURING TESTING