Rene OESTERHOLT

Person

Vught, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 8,368,902
- Issue date Feb 5, 2013
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,880,901
- Issue date Feb 1, 2011
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,859,686
- Issue date Dec 28, 2010
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,528,965
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, calibration method, device manufacturing me...
- Patent number 7,502,096
- Issue date Mar 10, 2009
- ASML Netherlands B.V.
- Jeffrey Godefridus Cornelis Tempelaars
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,408,655
- Issue date Aug 5, 2008
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating or qualifying a lithographic apparatus or par...
- Patent number 7,374,957
- Issue date May 20, 2008
- ASML Netherlands B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,292,312
- Issue date Nov 6, 2007
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,256,871
- Issue date Aug 14, 2007
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Using unflatness information of the substrate table or mask table f...
- Patent number 7,239,368
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20110075154
- Publication date Mar 31, 2011
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20100220335
- Publication date Sep 2, 2010
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20090207422
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20080074681
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20070256471
- Publication date Nov 8, 2007
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, calibration method, device manufacturing me...
- Publication number 20070181827
- Publication date Aug 9, 2007
- ASML NETHERLANDS B.V.
- Jeffrey Godefridus Cornelis Tempelaars
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for calibrating or qualifying a lithographic apparatus or pa...
- Publication number 20070009814
- Publication date Jan 11, 2007
- ASML NETHERLANDS B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using unflatness information of the substrate table or mask table f...
- Publication number 20060114436
- Publication date Jun 1, 2006
- ASML NETHERLANDS B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20060023178
- Publication date Feb 2, 2006
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20060023194
- Publication date Feb 2, 2006
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Rene OESTERHOLT

Person

Patents Grantslast 30 patents

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus, calibration method, device manufacturing me...

Lithographic apparatus and method for calibrating the same

Method of calibrating or qualifying a lithographic apparatus or par...

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Using unflatness information of the substrate table or mask table f...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus, calibration method, device manufacturing me...

Method for calibrating or qualifying a lithographic apparatus or pa...

Using unflatness information of the substrate table or mask table f...

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same