Rene Schenck

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
System for inspecting a disk-shaped object
- Patent number 7,426,024
- Issue date Sep 16, 2008
- Vistec Semiconductor Systems Jena GmbH
- René Schenck
- G01 - MEASURING TESTING
Information Patent Grant
System for the detection of macrodefects
- Patent number 7,265,823
- Issue date Sep 4, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Device for holding disk-shaped objects
- Publication number 20090309285
- Publication date Dec 17, 2009
- Vistec Semiconductor Systems Jena GmbH
- Rene Schenck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of determining geometric parameters of a wafer
- Publication number 20080208523
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems GmbH
- Rene Schenck
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for holding disk-like objects
- Publication number 20080203636
- Publication date Aug 28, 2008
- VISTEC Semiconductor Systems Jena GmbH
- Rene Schenck
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Device for handling disk-like objects
- Publication number 20070077136
- Publication date Apr 5, 2007
- Vistec Semiconductor Systems GmbH
- Rene Schenck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for determining the lateral offset of an XYZ stage
- Publication number 20060239507
- Publication date Oct 26, 2006
- Leica Microsystems CMS GmbH
- Rene Schenck
- G02 - OPTICS
Information Patent Application
Apparatus for Inspecting the front side and backside of a disk-shap...
- Publication number 20060119367
- Publication date Jun 8, 2006
- Leica Microsystems Jena GmbH
- Thomas Iffland
- G01 - MEASURING TESTING
Information Patent Application
System for the detection of macrodefects
- Publication number 20050101036
- Publication date May 12, 2005
- LEICA MICROSYSTEMS
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS

Rene Schenck

Person

Patents Grantslast 30 patents

System for inspecting a disk-shaped object

System for the detection of macrodefects

Patents Applicationslast 30 patents

Device for holding disk-shaped objects

Method of determining geometric parameters of a wafer

Apparatus for holding disk-like objects

Device for handling disk-like objects

Method for determining the lateral offset of an XYZ stage

Apparatus for Inspecting the front side and backside of a disk-shap...

System for the detection of macrodefects