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Rene Theodorus, Petrus Compen
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Valkenswaard, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate table, lithographic apparatus and device manufacturing me...
Patent number
9,329,497
Issue date
May 3, 2016
ASML Netherlands B.V.
Bensely Albert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,019,476
Issue date
Apr 28, 2015
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Clamping device and object loading method
Patent number
9,013,682
Issue date
Apr 21, 2015
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, cleaning system and cleaning method for in...
Patent number
8,902,399
Issue date
Dec 2, 2014
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a method for removing material of one or mo...
Patent number
8,810,777
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
B24 - GRINDING POLISHING
Information
Patent Grant
Lithographic apparatus, substrate table, and method for enhancing s...
Patent number
8,792,085
Issue date
Jul 29, 2014
ASML Netherlands B.V.
Michiel Puyt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method and lithographic apparatus for calibrating an op...
Patent number
8,384,882
Issue date
Feb 26, 2013
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Substrate Table, Lithographic Apparatus and Device Manufacturing Me...
Publication number
20130301028
Publication date
Nov 14, 2013
ASML NETHERLANDS B.V.
Bensely Albert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Clamping Device And Object Loading Method
Publication number
20100195080
Publication date
Aug 5, 2010
ASML Netherlands B.V.
Rene Theodorus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY